Advanced Nanoelectronics

The course gives an introduction to electronic transport in semiconductor nanoscale devices. Nanoscale transistor models and quantum effects in these are introduced. Functional materials (magnetic, ferroelectric) and applications for these within electronics (GMR, TMR, memory technology) are discussed.
Basic mechanics for design of microelectromechanical systems (MEMS) is presented, together with different principles for sensors and actuators based on piezoresistivity, capacitance, thermal and optical effects. Design and fabrication of different sensors such as pressure sensors, accelerometers, and gas sensors is given in detail. In addition, optic, thermal, chemical and biological sensors and actuators and their applications will be discussed.

Knowledge:
The candidate
- can explain how electronic material properties are changed for nanoscaled devices,
- can develop models of miniaturized electronic devices such as field effect transistors,
- can analyze the working principles of miniaturized electronic devices,
- knows about emerging technologies for energy efficient electronics,
- has knowledge on the basic properties and applications of microsystem technology
- has knowledge on the general characteristics of sensors and actuators
- has detailed knowledge on the functional principles and structure of various types of micro-electro-mechanical sensors and actuators
- has knowledge on the key aspects, trade-offs and basic principles of design and optimization of MEMS.

Technical skills:
The candidate can
- select among different theoretical approaches to describe electronic transport in electronic devices,
- combine the gained knowledge in order to develop models of electronic devices,
- propose suitable sensor or actuation principles to achieve a particular function
- select the optimal sensor or actuator design
- carry out simple calculations of electro-mechanical properties of micro-electro-mechanical components
- propose a suitable process for the fabrication of specific micro-electro-mechanical components.

General expertise:
The candidate can
- discuss microsystem technology in the context of important trends within information technology,
- plan and conduct a seminar on a self-chosen topic, alone or as a participant in a group,
- communicate key subjects such as theories, issues, and solutions, both in writing and verbally.

Lectures, tutorials. The students will give a seminar on a self-chosen topic.