MEMS Technology and Design

This course will be taught every year, starting in fall 2011.
An introduction to micro- and nanofabrication with focus on silicon technology for fabrication of sensors and actuators. Basic mechanics for design of microelectromechanical systems (MEMS) is given together with different principles for sensors and actuators based on piezoresistivity, capacitance, thermal effects, piezoelectricity and optic effects. Design and fabrication of different sensors as pressure sensors, accelerometers, gyroscopes, and gas sensors is given in detail. In addition one will discuss optic, thermal, chemical and biological sensors and actuators and their applications.

The course will give the principles for and an introduction to micro- and nanofabrication in silicon technology of sensors and actuators.

Knowledge
• describe the basic properties and applications of microsystem technology,
• describe the general characteristics of sensors and actuators,
• describe the functional principles and structure of various types of micro-electro-mechanical sensors and actuators,
• have knowledge of the key aspects, trade-offs and basic principles of design and optimization of MEMS,
• know the different fabrication processes and materials for the production of MEMS,
• carry out calculations of functional characteristics of a micro- electro-mechanical component,
• be able to describe specific case studies for the design, optimization and production of specific micro-electro-mechanical components.

Skills
• be able to to suggest the selection of suitable sensor or actuation to achieve a particular function,
• be able to select the optimal sensor or actuator design,
• be able to propose a suitable process for the production of specific micro-electro-mechanical components.

General skills
• be able to microsystem technology in the context of important trends in information technology.

Lectures, tutorials. If there is a re-sit examination, the examination form may be changed from oral to written.