Micro- and nanofabrication

This course provides an introduction to micro- and nanofabrication, including silicon technology for fabrication of sensors and actuators. Selected semiconductor manufacturing processes in clean room, such as photolithography, etch, deposition and metallization are highlighted. Basic mechanics for design of microelectromechanical systems (MEMS) is presented, together with different principles for sensors and actuators based on piezoresistivity, electrostatics, capacitance and thermal effects. Design and fabrication of different physical sensors, such as pressure sensors and accelerometers, are given in detail.

Knowledge: The candidate has: - detailed knowledge on selected topics within fabrication technology for semiconductor devices and integrated circuits, as well as the different fabrication processes for manufacturing of MEMS - knowledge on the basic properties and applications of microsystem technology - knowledge on the general characteristics of sensors and actuators - detailed knowledge on the functional principles and structure of various types of micro-electro-mechanical sensors and actuators - knowledge on the key aspects, trade-offs and basic principles of design and optimization of MEMS. Technical skills: The candidate can: - do photolithography and simple processing of semiconductors in clean room, and do characterization with selected techniques - propose suitable sensor or actuation principles to achieve a particular function - select the optimal sensor or actuator design - carry out simple calculations of electro-mechanical properties of micro-electro-mechanical components - propose a suitable process for the fabrication of specific micro-electro-mechanical components. General expertise: The candidate has: - the required knowledge for more advanced studies on the fabrication technology and principles of operation of advanced semiconductor devices, electronic circuits and systems. - the required knowledge to discuss micro system technology in the context of important trends within information technology.

Auditorium lectures and exercises (problems), and laboratory excercises in clean room and characterization lab.