Electron Microscopy

The course is given every second year, next time will be spring 2014.
X-ray wave dispersive micro-analysis in EPMA and Cliff-Lorimer based energy dispersive micro-analysis in TEM are central topics. Other topics are new SEM technologies, optimizing of SEM operation parameters, SEM related specimen preparation techniques, electron micro-diffraction (EBSD), electron scattering theory, imaging of lattice defects in TEM, and electron energy loss spectroscopy (EELS).

The course gives a theoretical background for chosen applications of SEM, EPMA and TEM.
After finished the course the student should be able to
- Explain the construction and function of central components in an EPMA
- Explain the theories for X-ray micoanalysis in EPMA (WDS) and TEM (Cliff-Lorimer)
- Suggest operating parameters for different types of micro-analyses in an EPMA
- Carry out a qualitative and a quantitatice micro-analysis in TEM
- Explain basic kinematic theory for electron scattering from a crystal
- Explain kinematic theory for imaging of lattice defects in TEM
- Carry out lattice imaging in TEM
- Explain the construction of a spectrometer for electron energy loss analysis (EELS)
- Explain elementary EELS theory
- Carry out simple imaging and foil thickness measurement by means of EELS
- Carry out qualitative and quantitative characterization of the microstructure by EBSD
- Explain the theory for high resolution (field emission) SEM
- Carry out high resolution imaging in FESEM
- Carry out specimen preparation of EBSD specimens

Lectures. Laboratory works includig practical use of the microscopes.